Patent number: 11094499
Abstract: The present invention provides an apparatus of charged-particle beam such as an electron microscope including a specimen table that can slide on a planar surface around the lower pole piece of the objective lens. The specimen table is confined in a specimen stage having one elastic protrusion and one or more elastic force receiving parts (e.g three permanent protrusions) that contact and press the table. When the specimen is under microscopic examination, disturbing vibration cannot generate a force sufficient to overcome the limiting friction between the specimen table and the planar surface of the objective lens. The invention exhibits numerous technical merits such as minimal or zero vibration noise, and improved image quality, among others.
Type: Grant
Filed: February 18, 2021
Date of Patent: August 17, 2021
Assignee: BORRIES PTE. LTD.
Inventors: Zhongwei Chen, Wei Fang, Xiaoming Chen, Daniel Tang, Liang-Fu Fan